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Posted on March 28, 2017June 12, 2017 by sarah

GRIFFITH – QLD Micro- and Nanotechnology Centre

Laser Microscope16.Plasma etch LAM 490 17.Plasma etch STS LPX ICP SR 18.Resist strip and plasma etch Tegal 915 19.Atmospheric furnace Hi Tech furnaces UK A 19.Atmospheric furnace Hi Tech furnaces UK A 21.Atmospheric furnace Hi Tech furnaces UK B 23.Metal and dielectric deposition by sputtering Surrey Nano Systems - Gamma 24.Thin film measurement Nanospec AFT 210 system 48.Litho Group 28.Film stress measurement Tencor Flexus 2320 26.Profileometer Veeco Dektak D150 including XY stage and vision software 25.Optical microscope Olympus MX50AF -IC inspection microscope 15.Epitaxial SiC growth MkII 14.Epitaxial SiC growth Griffith MkI system 12.Wafer rinse dryer Semitool SRD 10.Wet bench for RCA cleaning - Non contaminating Weslan 9.Mask cleaner Ultratech 602 8.Thin film measurement Nanospec AFT 180 7.Resist development SSE OPTIcoat ST22 Exposure Quintel Ultra µ line7000 4.Resist coat SSE OPTIcoat ST22+ HMDS oven YES 31048.Litho Group21.Atmospheric furnace Hi Tech furnaces UK B
16.Plasma etch LAM 490 4.Resist coat SSE OPTIcoat ST22+ HMDS oven YES 310

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